Kim, J.
, Ehrman, S.
and Germer, T.
(2004),
Influence of Particle Oxide Coating on Light Scattering by Submicron Metal Particles on Silicon Wafers, Applied Physics Letters
(Accessed June 19, 2025)
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Influence of Particle Oxide Coating on Light Scattering by Submicron Metal Particles on Silicon Wafers
Published
Author(s)
, S H. Ehrman,
Abstract
We report the effect that room temperature oxidation has on the scattering of 633 nm light by copper particles deposited on a silicon wafer. The results provide a validation for a theory of light scattering by coated particles on a substrate and establish the lifetime of these particles as light scattering standards to be on the order of a few months. The results also suggest that the room temperature oxidation of copper particles proceeds in a continuous manner, rather than approaching an asymptotic thickness as found by Cabrera and Mott [Rep. Prog. Phys. 12, 163 (1948)] on copper films.Citation
Applied Physics Letters
Volume
84
Issue
No 8
Pub Type
Journals
Keywords
copper, oxidation, particles, scattering, surfaces
Citation
Issues
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Created January 31, 2004, Updated October 12, 2021