NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Optical Properties of Fluids For 248 nm and 193 nm Immersion Photolithography

Published

Author(s)

Simon G. Kaplan, John H. Burnett

Abstract

We present measured values of the refractive index, thermo-optic coefficient, and absorption coefficient of a number of common organic solvents and aqueous inorganic solutions that may have application in immersion photolithography at 248 nm or 193 nm wavelength. The measurements were performed with a laser-based Hilger-Chance refractometer system whose design and operation are described. The optical properties of the sample fluids are compared to water, the currently favored immersion medium, and we discuss the potential for finding higher-index fluids which will be suitable for this application.
Citation
Applied Optics
Pub Type
Journals

Keywords

fluids, immersion photolithography, optical absorption, refractive index, thermo-optic coefficient

Citation

Kaplan, S. and Burnett, J. (2006), Optical Properties of Fluids For 248 nm and 193 nm Immersion Photolithography, Applied Optics (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 10, 2006, Updated June 27, 2017
Was this page helpful?