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S S. Churilov, Y N. Joshi, Joseph Reader, R R. Kildiyarova
Abstract
The spectrum of ten-times ionized xenon Xe XI was observed in the region 105 Angstrom} to 157 Angstrom} with a low-inductance vacuum spark and a 10.7 m grazing-incidence spectrograph. About 200 lines belonging to the 4p64d8-(4d75p+4d74f+4p54d9) transition array were observed. Of these lines, 140 are in the Region 130 Angstrom} to 140 Angstrom}, which is of importance for extreme ultraviolet (EUV) projection lithography. The spectrum was interpreted by means of Hartree-Fock calculations and orthogonal parameters using scaling factors for the energy parameters obtained by extrapolation along the Rh II isoelectronic sequence. All 9 levels of the 4d8 configuration and 123 levels of the 4d75p+4d74f+4p54d9 configurations were established. Transition probabilities for all observed lines were calculated with fitted values of the energy parameters.
Churilov, S.
, Joshi, Y.
, Reader, J.
and Kildiyarova, R.
(2004),
4p<sup>6</sup>4d<sup>8</sup>-(4d<sup>7</sup>5p+4d<sup>7</sup>4f+4p<sup>5</sup>4d<sup>9</sup>) Transitions in Xe XI, Physica Scripta
(Accessed October 13, 2025)