NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Characterization of Nanoporous Low-K Thin Films by SANS Contrast Variation

Published

Author(s)

R C. Hedden, Hae-Jeong Lee, Barry J. Bauer

Abstract

Small-angle neutron scattering (SANS) contrast variation is applied to characterization of nanoporous low-dielectric constant (low-k) thin films. Films are exposed to saturated solvent vapor in air, whereby the pores fill with liquid by capillary condensation. The pores are filled with mixtures of hydrogen- and deuterium-containing solvents to vary the neutron contrast with the wall (matrix). The composition of the solvent mixture is systematically varied to identify a composition that minimizes the scattered intensity (contrast match point). From the contrast match point composition, film characteristics including matrix density and homogeneity are assessed. Four spin-on low-k materials including a methylsilsesquioxane (MSQ), an organic polymer, a xerogel, and a hydrogensilsesquioxane (HSQ), are characterized by the new technique. Calculated matrix mass densities are compared to independent density measurements obtained by an established specular X-ray reflectivity (SXR) technique.
Citation
Langmuir
Pub Type
Journals

Keywords

contrast match, contrast variation, low-k dielectrics, nanoporous thin films, SANS, X-ray reflectivity

Citation

Hedden, R. , Lee, H. and Bauer, B. (2008), Characterization of Nanoporous Low-K Thin Films by SANS Contrast Variation, Langmuir (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 16, 2008
Was this page helpful?