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Surfactant Effect in the Suppressing of Orange-Peel Coupling in Magnetic Tunnel Junctions by Pre-Oxidation
Author(s)
William F. Egelhoff Jr., Robert D. McMichael, Mark D. Stiles, Cedric J. Powell, John E. Bonevich, M Wormington
Abstract
Pre-oxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. In this paper, we report structural studies on this effect using grazing incidence x-ray reflectometry and transmission electron microscopy. The results suggest that oxygen acts as a surfactant to smooth the surface.
Citation
Physical Review B (Condensed Matter and Materials Physics)
Pub Type
Journals
Keywords
magnetic tunnel junction, orange-peel coupling, pre-oxidation
Citation
Egelhoff, W.
, McMichael, R.
, Stiles, M.
, Powell, C.
, Bonevich, J.
and Wormington, M.
(1970),
Surfactant Effect in the Suppressing of Orange-Peel Coupling in Magnetic Tunnel Junctions by Pre-Oxidation, Physical Review B (Condensed Matter and Materials Physics)
(Accessed October 2, 2025)