Bouldin, C.
, Woicik, J.
, Ravel, B.
, Kaiser, D.
and Vaudin, M.
(2021),
Stoichiometry and Phase Composition of MOCVD Barium Titanate Films, Journal of Materials Research (Accessed June 19, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Stoichiometry and Phase Composition of MOCVD Barium Titanate Films
Published
Author(s)
, , , ,
Abstract
X-ray absorption fine structure (XAFS), x-ray diffraction (XRD) and x-ray fluorescence (XRF) have been used to study the stoichiometry and phase composition of thin (approximately equal to} 1 micron) films deposited on MgO substrates. Deposition temperatures were 600 degrees}C to 800 degrees}C and film growth rates were approximately equal to} 1 Angstrom/s. When the films are very Ba-rich, they form amorphous films of di-Barium Titanate, while the Ba-deficient films deposited at low temperatures form amorphous phases that are similar to Barium Titanate (BaTi03) but with BA vacancies and orientational disorder of the Ti-0 octahedra.Citation
Journal of Materials Research
Pub Type
Journals
Keywords
dielectric constant, EXAFS, MOCVD, XANES
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created October 12, 2021