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Design And Fabrication Of MJTCs On Quartz Substrates At NIST
Published
Author(s)
Thomas E. Lipe Jr., Joseph R. Kinard Jr., Luciana Scarioni
Abstract
Wet and dry etching are employed in the fabrication of new planar, thin-film multijunction thermal converters (MJTCs) on quartz membranes and crystalline quartz chips at NIST. The use of crystalline quartz as a material for the membrane and for the chip improves the performance of the MJTC in the frequency range from 100 kHz to 100 MHz. Simulations of the ac-dc voltage transfer difference for a heater resistance of 400 Ω in the frequency range from 1 MHz to 100 MHz show a reduction in the ac-dc transfer difference of more than one order of magnitude in comparison with MJTCs fabricated on silicon chips.
Citation
IEEE Transactions on Instrumentation and Measurement
Lipe Jr., T.
, Kinard Jr., J.
and Scarioni, L.
(2008),
Design And Fabrication Of MJTCs On Quartz Substrates At NIST, IEEE Transactions on Instrumentation and Measurement, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33053
(Accessed October 10, 2025)