The efficiency of optical tweezer manufacturing depends on the number of trapping beams available. Micro optics technology offers the opportunity to significantly increase the number of trapping beams without a significant increase of the cost or size of the optical circuitry. Here we report on the sensors, optical circuit and the experimental work to control an array of laser beams generated by a single laser diode, for optical tweezer based manufacturing. Our array of laser beams is generated by an array of servo controlled scanning dual-axis micro-mirrors. Capacitor electrodes underneath the micro-mirror plates provide electrostatic actuation and capacitive angular rotation position sensing, which allows feedback control of the micro-mirror position. With proper reflecting surfaces it is possible to control the impact angle of the individual laser beams onto the micro-nano-particles, thus generating an optical beam griper effect.
Proceedings Title: Proceedings of the Second IEEE Conference on Nanotechnology
Conference Dates: August 26-28, 2002
Conference Location: Washington DC, MD
Conference Title: Second IEEE Conference on Nanotechnology
Pub Type: Conferences
micro-mirror array, nano-manufacturing, optical trapping