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Chemical Vapor Deposition of Metal and Ceramic Thin Films by Sodium Vapor Phase Reduction of Metal Halide Precursors
Published
Author(s)
Jay H. Hendricks, Michael R. Zachariah
Proceedings Title
Electrochemical Society Meeting
Conference Location
CO
Conference Title
Electrochemical Society Meeting Abstracts
Pub Type
Conferences
Citation
Hendricks, J.
and Zachariah, M.
(1998),
Chemical Vapor Deposition of Metal and Ceramic Thin Films by Sodium Vapor Phase Reduction of Metal Halide Precursors, Electrochemical Society Meeting, CO
(Accessed May 5, 2024)