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PUBLICATIONS

Calibration Wafer for Temperature Measurements in RTP Tools

Published

Author(s)

Kenneth G. Kreider, D P. Dewitt, B K. Tsai, F J. Lovas, D W. Allen
Citation
Characterization and Metrology for ULSI Technology
Publisher Info
AIP, Woodbury, NY
Pub Type
Books

Citation

Kreider, K. , DeWitt, D. , Tsai, B. , Lovas, F. and Allen, D. (1998), Calibration Wafer for Temperature Measurements in RTP Tools, AIP, Woodbury, NY (Accessed October 16, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 1, 1998, Updated February 17, 2017
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