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PUBLICATIONS

Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas

Published

Author(s)

M Edamura, Eric C. Benck
Citation
Journal of Vacuum Science and Technology A
Pub Type
Journals

Citation

Edamura, M. and Benck, E. (2003), Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas, Journal of Vacuum Science and Technology A (Accessed October 1, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 31, 2002, Updated October 12, 2021
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