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The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas
Published
Author(s)
A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
56
Pub Type
Journals
Citation
Schwabedissen, A.
, Benck, E.
and Roberts, J.
(1997),
The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
(Accessed October 1, 2025)