We show how coplanar-waveguide probe-tip scattering parameter calibrations performed in one coplanar waveguide conductor geometry may be adjusted for measurement in another. The method models the difference between the two probe-tip-to-coplanar-waveguide transitions as a change in shunt capacitance and applies previously developed techniques for its determination and compensation. Comparison to accurate multiline Thro-Reflect-Line calibrations verifies the accuracy of the method. Differences in both conductor geometry and substrate permittivity are considered in the comparison. The method requires only a single, compact open stub or thru line fabricated on the measurement wafer.
Citation: IEEE Microwave and Guided Wave Letters
Pub Type: Journals
Automatic network analyzers, coplanar wave-guide, on-wafer calibration