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This paper compares a simple quasi-TEM model for coplanar waveguide fabricated on moderately doped silicon substrates to measurement. While the coplanar waveguide currents and magnetic fields are unaffected by the substrate, a simple capacitive model can accurately account for the effects of the substrate.
Proceedings Title
Dig., Electrical Performance of Electronic Packaging Conf.
Conference Dates
October 27-29, 1997
Conference Location
Austin, TX
Conference Title
Electrical Performance of Electronic Packaging, 1997., IEEE 6th Topical Meeting
Williams, D.
, Janezic, M.
and Ralston, A.
(1997),
Quasi-TEM Model for Coplanar Waveguide on Silicon, Dig., Electrical Performance of Electronic Packaging Conf., Austin, TX, [online], https://doi.org/10.1109/EPEP.1997.634076
(Accessed October 20, 2025)