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PUBLICATIONS

Use of Ion Scattering Spectroscopy to Monitor the Nb Target Mitridation During Reactive Sputtering

Published

Author(s)

D. J. Lichtenwalner, A. C. Anderson, David A. Rudman
Proceedings Title
Proc., Mater. Soc. Symp.;121, Issue 613
Conference Location
Undefined
Pub Type
Conferences
Sensors

Citation

Lichtenwalner, D. , Anderson, A. and Rudman, D. (1991), Use of Ion Scattering Spectroscopy to Monitor the Nb Target Mitridation During Reactive Sputtering, Proc., Mater. Soc. Symp.;121, Issue 613, Undefined (Accessed October 3, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1991, Updated October 12, 2021
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