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Measurement of Roughness of Two Interfaces of a Dielectric Film by Scattering Ellipsometry

Published

Author(s)

Thomas A. Germer
Citation
Physical Review Letters
Volume
85
Issue
2

Citation

Germer, T. (2000), Measurement of Roughness of Two Interfaces of a Dielectric Film by Scattering Ellipsometry, Physical Review Letters (Accessed May 10, 2026)
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Issues

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Created January 1, 2000, Updated February 17, 2017
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