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PUBLICATIONS

Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas

Published

Author(s)

Francis J. Lovas, Benjamin K. Tsai, Charles E. Gibson
Proceedings Title
Rapid Thermal and Integrated Processing. VII
Volume
525
Conference Dates
April 13-17, 1998
Conference Location
San Francisco, CA
Conference Title
Mat. Res. Soc. Symp. Proc.
Pub Type
Conferences

Citation

Lovas, F. , Tsai, B. and Gibson, C. (1998), Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas, Rapid Thermal and Integrated Processing. VII , San Francisco, CA (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 1998, Updated February 17, 2017
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