Jelenkovic, B.
and Gallagher, A.
(1997),
Particle accumulation in a flowing silane RF discharge, Journal of Applied Physics
(Accessed March 5, 2026)
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Particle accumulation in a flowing silane RF discharge
Published
Author(s)
, A Gallagher
Citation
Journal of Applied Physics
Volume
82
Pub Type
Journals
Citation
Issues
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Created January 1, 1997, Updated February 17, 2017