Ion-implanted materials are commonly used in secondary-ion mass spectrometry for the calibration of instruments. This international Standard was prepared to provide a uniform method for determining the relative sensitivity factor (RSF) of an element in a specified matrix from an ion-implanted reference material, and to show how the concentration of the element in a different sample of the same matrix material can be determined. In this standard, terms are defined and a formula is given for calculating an isotopic RSF for a particular element-matrix combination from a SIMS depth profile of an ion-implanted external standard. Options are provided for cycle-by-cycle normalization to a matrix reference species or normalization to a single average value of a matrix signal. Another formula is given for using this RSF to quantify the concentration of the same element as a function of depth in a different sample of the same matrix material. Requirements of ion-implanted reference materials for use with this method are specified, as are the contents of a test report when an RSF is determined by this method.
Citation: Surface and Interface Analysis
Issue: No. 3
Pub Type: Journals
ion implantation, reference material, relative sinsitivity factor, RSF, SIMS