Robust infrared filters for x-ray spectroscopy

Published

March 11, 2004

Author(s)

Nathan A. Tomlin, Joel Ullom, James A. Beall, Gene C. Hilton, Steven Deiker, W.Bertrand (Randy) Doriese, Kent D. Irwin, Carl D. Reintsema, Leila R. Vale, Yizi Xu

Abstract

One challenge to using cryogenic detectors for x-ray spectroscopy on a scanning electron microscope is the implementation of infrared blocking filters. In order to achieve high x-ray transmission, these filters can be as thin as 250 nm and consequently are extremely fragile. To avoid breaking the windows, the cryostat must be evacuated slowly and by a trained operator. In this presentation, we describe the filter system currently used at NIST. In addition, we describe recent efforts to build a more robust and easy-to-use filter system. We present initial efforts to strengthen conventional aluminum-parylene filters with micromachined silicon grids that only reduce x-ray transmission by 2 %. We also describe an automated pump-out system based on a commercial mass-flow controller.

Citation

Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment

Volume

520

Issue

1-3

Pub Type

Journals

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Keywords

x-ray spectroscopy, x-ray windows, infrared filters

Citation

Tomlin, N. , Ullom, J. , Beall, J. , Hilton, G. , Deiker, S. , Doriese, W. , Irwin, K. , Reintsema, C. , Vale, L. and Xu, Y. (2004), Robust infrared filters for x-ray spectroscopy, Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31421 (Accessed October 7, 2025)