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Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging
Published
Author(s)
Simone Lee, Thomas Mitchell (Mitch) Wallis, John M. Moreland, Pavel Kabos, Y. C. Lee
Abstract
Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk microcachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes.
Lee, S.
, Wallis, T.
, Moreland, J.
, Kabos, P.
and Lee, Y.
(2007),
Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging, Journal of Microelectromechanical Systems, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32698
(Accessed October 1, 2025)