Morris, D.
(2009),
Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903064
(Accessed October 11, 2025)
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Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow
Published
Author(s)
Abstract
Diamond nanoindentation probes may perform many thousands of indentations over years of service life. There is general agreement that the probes need frequent cleaning, but techniques for doing so are mostly anecdotes shared between experimentalists. In preparation for the measurement of the shape of a nanoindentation probe by a scanning probe microscope, cleaning by carbon dioxide snow jets and oxygen plasma was investigated. Repeated indentation on a thumbprint-contaminated surface formed a compound that was very resistant to removal by solvents, CO2 snow and plasma. CO2 snow cleaning is found to be a generally effective cleaning procedure.Citation
Review of Scientific Instruments
Volume
80
Pub Type
Journals
Download Paper
Keywords
nanoindentation, plasma, carbon dioxide snow, cleaning
Citation
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Created December 7, 2009, Updated February 19, 2017