Moylan, S.
(2010),
Complete Inspection: In-situ system to inspect 100% of micro-parts, MicroManufacturing, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904609
(Accessed October 13, 2025)
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Complete Inspection: In-situ system to inspect 100% of micro-parts
Published
Author(s)
Abstract
On-machine measurement can provide significant advantages in part metrology at the micro/meso-scale. The strengths of measurement by fringe projection techniques directly address the difficulties presented by on-machine measurement. An experimental setup has been constructed using solely off-the-shelf components to perform on-machine measurements using fringe projection. The setup has been used to accurately measure typical micro/meso-scale parts and features including a step-height of 100 mm. Further improvements are necessary to improve measurement uncertainty and overcome important obstacles.Citation
MicroManufacturing
Volume
3
Issue
1
Pub Type
Others
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Keywords
in-situ optical metrology, fringe projection, micro/meso-scale machine tools
Citation
Issues
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Created February 1, 2010, Updated February 19, 2017