Vorburger, T.
(2010),
Introduction to Surface Finish Metrology, Optical Fabrication and Testing (OF&T) Topical Meeting, Jackson Hole, WY, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905020 (Accessed May 20, 2026)
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Introduction to Surface Finish Metrology
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Author(s)
Abstract
We discuss the range of methods available to measure surface finish and emphasize the methods of stylus profiling and various types of optical profiling. Documentary standards for measurement of surface texture and comparisons between methods are also discussed.Proceedings Title
Optical Fabrication and Testing (OF&T) Topical Meeting
Conference Dates
June 13-16, 2010
Conference Location
Jackson Hole, WY, US
Pub Type
Conferences
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Keywords
surface finish, roughness, texture, topography, stylus, phase shifting, coherence scanning, confocal
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Created June 14, 2010, Updated May 7, 2026