Optimization of Temperature Programmed Sensing for Gas Identification Using Micro-Hotplate Sensors

Published

November 26, 1998

Author(s)

T A. Kunt, T. J. McAvoy, Richard E. Cavicchi, Stephen Semancik

Abstract

Micro-hotplate chemical gas sensors, such as those being developed at the National Institute of Standards and Technology [NIST] by micromaching SI, can be operated in a temperature-pulsed mode, due to their small size and mass. In this paper, a new methodology is presented to optimize the operation of micro-hotplate gas sensors for discriminating volatile organic compounds, while minimizing the detection time. The Wavelet Network method is applied to accurately predict the sensor's response for a given temperature profile. Once a dynamic model is obtained, it is used for off-line optimization of the temperature profile, I.e. the maximization of the difference between two gas signatures. The methodology was implemented in a case study in which either methanol or ethanol had to be detected in air, but the methodology is generic, and it can be applied to any two gases.

Citation

Sensors And Actuators

Volume

53

Issue

1-2

Pub Type

Journals

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DOI Link

Keywords

conductance, ethanol, gas sensor, methanol, micromachining, microsensor, optimization, temperature programmed, tin oxide

Citation

Kunt, T. , McAvoy, T. , Cavicchi, R. and Semancik, S. (1998), Optimization of Temperature Programmed Sensing for Gas Identification Using Micro-Hotplate Sensors, Sensors And Actuators, [online], https://doi.org/10.1016/S0925-4005(98)00244-5 (Accessed November 5, 2025)