Berg, R.
, Timothy, G.
and Vest, R.
(2013),
Constant pressure primary flow standard for gas flows from 0.01 cm<sup>3</sup>/min to 100 cm<sup>3</sup>/min (10<sup>-8</sup> mol/s to 10<sup>-5</sup> mol/s), Flow Measurement and Instrumentation, [online], https://doi.org/10.1016/j.flowmeasinst.2013.12.002
(Accessed October 10, 2025)
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Constant pressure primary flow standard for gas flows from 0.01 cm3/min to 100 cm3/min (10-8 mol/s to 10-5 mol/s)
Published
Author(s)
, Gooding Timothy,
Abstract
We describe a flow meter for gas flows in the range from 0.01 sccm to 100 sccm with a relative standard uncertainty of 0.03 % at 1 sccm. (1 sccm ≈ 1 cm3/min of an ideal gas at 101325 Pa and 0 C ≈ 0.7 mol/s.) The flow meter calibrates a secondary meter by withdrawing a piston from a cylinder held at constant pressure P while gas flows from the secondary meter into the cylinder. The flow meter can operate anywhere in the range 10 kPaCitation
Flow Measurement and Instrumentation
Volume
35
Pub Type
Journals
Download Paper
Keywords
constant pressure flow meter, gas flow, primary gas flow standard
Citation
Issues
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Created December 17, 2013, Updated November 10, 2018