Barnes, B.
(2026),
Harnessing the extreme ultraviolet for critical dimension metrology, FCMN presentation archives, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=962164, https://www.pathlms.com/avstechnicallibrary/events/12222/event_sections/19435/slide_presentations/558210 (Accessed September 1, 2026)
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Harnessing the extreme ultraviolet for critical dimension metrology
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Created June 9, 2026, Updated August 31, 2026