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Atom Probe Tomography

Published

Author(s)

Ann Debay, Baptiste Gault, Francois Vurpillot

Abstract

Atom probe tomography (APT) has been rising in prominence since its inception. APT grew from field-ion microscopy, which was the first technique to allow for directly imaging individual atoms on a surface, as early as the 1950s. Today, APT provides compositional mapping with sub-nanometer spatial resolution across a range of mass that spans hydrogen to the heaviest elements. Through successive instrument and detector developments the range of materials that can be analyzed has widened.
Citation
Physical Metallurgy, 6th Ed.
Volume
2
Publisher Info
Elsevier, London,

Keywords

Atom Probe Tomography

Citation

Debay, A. , Gault, B. and Vurpillot, F. (2026), Atom Probe Tomography, Elsevier, London, , [online], https://doi.org/10.1016/B978-0-443-21710-4.00015-X, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959592 (Accessed June 2, 2026)
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Created May 13, 2026, Updated June 1, 2026
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