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PUBLICATIONS

Binary Pseudo-Random Array for Calibration of Interferometers with Transmission Spheres and Cylinders

Published

Author(s)

Ulf Griesmann, Keiko Munechika, Simon Rochester, Weilun Chao, Carlos Pina-Hernandez, Kaito Yamada, Michael Biskach, Peter Takacs, Valeriy Yashchuk

Abstract

Binary pseudo-random array (BPRA) "white noise" artifacts are highly effective for characterizing the instrument transfer function (ITF) of surface topography metrology tools and wavefront measurement instruments. These BPRA artifacts feature all spatial frequencies within the instrument bandpass equally, resulting in a power spectral density with a white-noise-like character. This characteristic allows for direct ITF determination with uniform sensitivity across the entire spatial frequency range. We have developed a novel BPRA calibration standard that combines the diffractive pattern of a reflection computer-generated hologram (CGH) with the white noise generating BPRA pattern. By integrating these technologies using the same lithographic techniques, the resulting calibration sample enables ITF characterization of a Fizeau interferometer with a transmission sphere, or any nulling optic.
Proceedings Title
Proceedings of SPIE Optics & Photonics 2024 volume 13135 - Interferometry and Structured Light
Conference Dates
August 18-22, 2024
Conference Location
San Diego, CA, US
Conference Title
Interferometry and Structured Light
Pub Type
Conferences

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Keywords

calibration, instrument transfer function, ITF, power spectral density, PSD, interferometric microscopes, binary pseudo-random, test standard, aberration, surface metrology
Optical physics and communications

Citation

Griesmann, U. , Munechika, K. , Rochester, S. , Chao, W. , Pina-Hernandez, C. , Yamada, K. , Biskach, M. , Takacs, P. and Yashchuk, V. (2024), Binary Pseudo-Random Array for Calibration of Interferometers with Transmission Spheres and Cylinders, Proceedings of SPIE Optics & Photonics 2024 volume 13135 - Interferometry and Structured Light, San Diego, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958665 (Accessed October 10, 2025)

Issues

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Created September 30, 2024, Updated September 29, 2025
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