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PUBLICATIONS

Some considerations regarding film thickness standards for the semiconductor industry:

Published

Author(s)

James R Ehrstein
Citation
- NBS IR 80-2158
Report Number
NBS IR 80-2158
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Ehrstein, J. (1980), Some considerations regarding film thickness standards for the semiconductor industry:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.80-2158 (Accessed October 15, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 1980, Updated May 19, 2023
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