Bullis, W.
(1980),
Metrology for submicrometer devices and circuits:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-61
(Accessed January 16, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Metrology for submicrometer devices and circuits:
Published
Author(s)
Citation
- NBS SP 400-61
Report Number
NBS SP 400-61
Pub Type
NIST Pubs
Download Paper
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 1980, Updated May 19, 2023