NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

Published

Author(s)

Maximilian Protte, Varun Verma, Jan Philipp Hopker, Richard Mirin, Sae Woo Nam, Tim Bartley

Abstract

In this paper, we demonstrate our results on micron-wide tungsten silicide superconducting nanowire single-photon detectors fabricated by laser lithography. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1 um
Citation
Superconductor Science & Technology
Pub Type
Journals

Download Paper

Local Download

Keywords

SNSPD, detector, single-photon, lithography
Superconductors, Superconducting electronics, Sensors, Optoelectronics, Optical physics and communications, Nanophotonics and Nanofabrication / manufacturing

Citation

Protte, M. , Verma, V. , Hopker, J. , Mirin, R. , Nam, S. and Bartley, T. (2022), Laser-lithographically written micron-wide superconducting nanowire single-photon detectors, Superconductor Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933523 (Accessed October 20, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 23, 2022, Updated May 5, 2023
Was this page helpful?