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PUBLICATIONS

A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope

Published

Author(s)

Jason D. Holm, Benjamin W. Caplins, Robert R. Keller

Abstract

A new programmable detector for scanning transmission electron microscopy (pSTEM) is described. A digital micromirror array lies at the heart of the detector and serves as a programmable virtual objective aperture. Two sensors, a photomultiplier tube and a CMOS digital camera are used to enable real-space transmission imaging and on-axis diffraction, respectively. Detector operation is demonstrated with several samples in a conventional scanning electron microscope (SEM).
Citation
TechConnect World Technical Proceedings
Volume
TechConnect Briefs 2019
Pub Type
Journals

Download Paper

Local Download

Keywords

scanning, transmission, electron microscopy, diffraction, programmable
Materials characterization

Citation

Holm, J. , Caplins, B. and Keller, R. (2019), A Programmable Transmission Electron Detector for Nanomaterials Characterization in a Scanning Electron Microscope, TechConnect World Technical Proceedings, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927907 (Accessed October 22, 2025)

Issues

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Created June 17, 2019, Updated August 28, 2019
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