Gears of Government Awards recognize individuals and teams across the Federal workforce whose dedication supports exceptional delivery of key outcomes for the American people, specifically around mission results, customer service, and accountable stewardship.
The honorees developed and deployed a new dimensional metrology method to solve a critical challenge for the semiconductor industry. The new method, Critical Dimension Small Angle X-ray Scattering (CD-SAXS), has been actively adopted across the industry for next-generation device manufacturing.