Two-dimensional imaging and modification of nanophotonic resonator modes using a focused ion beam

Published

November 20, 2017

Author(s)

William R. McGehee, Thomas Michels, Vladimir A. Aksyuk, Jabez J. McClelland

Abstract

We report 2D imaging of the optical mode intensity of silicon microdisk resonators using a pulsed, low-energy focused ion beam of Li+. The ion beam locally modifies the resonator structure, causing temporally varying spectroscopic shifts of the optical resonances. Images are acquired by rastering the ion beam across the disk surface and extracting the maximum mode shift at the location of each ion pulse. An additional shift caused by ion beam heating is observed and is independently extracted to directly measure the thermal response of the device. The technique enables direct visualization of the splitting of degenerate modes into spatially-resolved standing waves due to breaking of the resonator’s rotational symmetry. Furthermore, it enables persistent optical mode editing, whereby the original symmetry between the modes is restored.

Citation

Optica

Volume

4

Issue

11

Pub Type

Journals

Download Paper

https://doi.org/10.1364/OPTICA.4.001444

Keywords

nanophotonics, focused ion beam, microdisk resonator, imaging

Citation

McGehee, W. , Michels, T. , Aksyuk, V. and McClelland, J. (2017), Two-dimensional imaging and modification of nanophotonic resonator modes using a focused ion beam, Optica, [online], https://doi.org/10.1364/OPTICA.4.001444 (Accessed October 11, 2025)