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We report on the development of on-chip integrated packaged nanoscale silicon photonic themperature sensors capable to detect temperature difference as small as 70 µK, thus showing the potential to replace legacy-based resistance thermometers
Klimov, N.
, Purdy, T.
and Ahmed, Z.
(2016),
Chip-Packaged Silicon Photonic Nanoscale Thermometers, CLEO-2016, San Jose, CO, US, [online], https://doi.org/10.1364/CLEO_AT.2016.AW1J.6, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920198
(Accessed October 13, 2025)