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William Alexander Osborn (Fed)

Materials Research Engineer

Will started at NIST as an NRC fellow developing a MEMS-based combinatorial measurement method for evaluating the kinetics of hydrogen sorption materials.  This work morphed into other microfabrication and instrument building projects, including:

  • Developing experimental techniques and reference standards for nano-scale strain measurement
  • Evaluating the mechanical properties of MEMS scale devices through the development of testable devices, theoretical models, and accurate measurements.
  • Microfabrication of non-traditional devices to enable research in the areas of strain measurement and mechanical property evaluation

In addition to the tools for microfabrication, Will has extensive experience with SEM/EBSD, vibrometry, and surface profilometry measurements.

Awards

  • National Academy of Engineering - Frontier of Engineering 2017
  • MML Colleague's Choice Award 2014

Publications

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

Author(s)
John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for the rapid (sub-100 ms response time) and sensitive detection

Data and Software Publications

Created October 9, 2019, Updated December 8, 2022
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