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2018 Gold Medal Award

Sunday, Kline, Windover

Sunday, Kline, Windover


Awarded for achievements in science and engineering. The group is recognized for the development and deployment of a new dimensional-metrology method to solve a critical challenge for the semiconductor industry. The new method, Critical Dimension Small Angle X-Ray Scattering (CD-SAXS), measures the shape of the three-dimensional nanostructures in semiconductor devices non-destructively, directly on production wafers at length scales needed to advance technology. Through close partnership with industry, CD-SAXS has now been actively adopted across the industry for next-generation device manufacturing. 


R. Joseph Kline

Materials Research Engineer
Material Measurement Laboratory

Daniel Sunday

Chemical Engineer
Material Measurement Laboratory

Donald Windover

Material Measurement Laboratory