Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
2018 Gold Medal Award
Sunday, Kline, Windover
AWARD CITATION
Awarded for achievements in science and engineering. The group is recognized for the development and deployment of a new dimensional-metrology method to solve a critical challenge for the semiconductor industry. The new method, Critical Dimension Small Angle X-Ray Scattering (CD-SAXS), measures the shape of the three-dimensional nanostructures in semiconductor devices non-destructively, directly on production wafers at length scales needed to advance technology. Through close partnership with industry, CD-SAXS has now been actively adopted across the industry for next-generation device manufacturing.