Micro-LEGO Towards 3D Assembly and Nanomaterial Integration

Reversible dry adhesion-based transfer printing provides a highly straightforward pathway to heterogeneous material integration. The speaker presents his recent research outcomes in terms of 3D heterogeneous integration accomplished in his laboratory which has been exploring responsive materials, microassembly, and nanomanufacturing technologies. The first part introduces biomimetic engineered reversible dry adhesives made of shape memory polymers. The second part shows how his reversible dry adhesives enable LEGO-like microassemly and nanomaterial integration through transfer printing techniques. Finally, the third part demonstrates the applications of his approaches with the examples not only of devices such as a microtoroid resonator, a tip-tilt-piston micromirror, and a RF MEMS switch, but also of processes such as colloidal quantum dot film patterning and integration. The strategies presented in his talk benefit research activities in smart dry adhesives, 3D MEMS, and nano devices.