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Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1 0.3Ga 0.7As, In 0.2Ga 0.8As, in 0.53Ga 0.47As, In 0.52A1 0.48As, and InP: Page feedback

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Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1<sub> 0.3</sub>Ga<sub> 0.7</sub>As, In<sub> 0.2</sub>Ga<sub> 0.8</sub>As, in<sub> 0.53</sub>Ga<sub> 0.47</sub>As, In<sub> 0.52</sub>A1<sub> 0.48</sub>As, and InP: Page feedback