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NIST Researchers Receive 2019 ACS National Award

Soles, Lin, Vivek, Li
Eric Lin, Christopher Soles, Wen-Li Wu, Vivek Prabhu

For developing the metrology ecosystem that was critical to improving chemically amplified photoresist formulations, enabling sub-100 nm lithographic patterning strategies, and realizing high performance semiconductors.  The award will be presented on April 2, 2019 at the 257th ACS National Meeting in Orlando. 

Created September 19, 2018, Updated November 15, 2019