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Kline, Sunday, and Windover Honored with Gears of Government Award
Daniel Sunday (left), Joseph Kline (middle), and Donald Windover (right) are honored with a Gears of Government award from Performance.gov
The honorees developed and deployed a new dimensional metrology method to solve a critical challenge for the semiconductor industry. The new method, Critical Dimension Small Angle X-ray Scattering (CD-SAXS), has been actively adopted across the industry for next-generation device manufacturing.