Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Spectroscopic Ellipsometry of Ta205 On Si, in Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics, edited by H. R. Huff, C. A. Richter, M. L. Green, G. Lucovsky, and T. Hattori: Page feedback

* Indicates required field

Was this page helpful?

Yes

Comments or suggestions? (optional)

Please do not put Personal Identifiable Information (PII) in this field.

Your email address (optional)

CAPTCHA

Get new captcha!

What code is in the image? *

Enter the characters shown in the image.

This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.

Was this page helpful?

Spectroscopic Ellipsometry of Ta<sub>2</sub>0<sub>5</sub> On Si, in Ultrathin SiO<sub>2</sub> and High-K Materials for ULSI Gate Dielectrics, edited by H. R. Huff, C. A. Richter, M. L. Green, G. Lucovsky, and T. Hattori: Page feedback