da Silva, F.
, Halloran, S.
, Yuan, L.
and Pappas, D.
(2008),
A z-component magneto-resistive sensor, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32901 (Accessed May 7, 2026)
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A z-component magneto-resistive sensor
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Abstract
A thin-film sensor is described that measures the component of the magnetic field perpendicular to the plane of the substrate (also called the z-component field.) The sensors are fabricated on anisotropically etched, V-shaped groves on Si(100) substrates. The anisotropic magnetoresistive (AMR) effect was used in order to set the bias parameters for z-component field sensitivity. The final result is a sensor that measures the z-component of the magnetic field with a 40 dB rejection of other comp onents. The devices can be integrated with standard in-plane x- and y-component sensor to form a system with a footprint of less 0.01 mm2 and a noise floor of 20 nT at 1 Hz.Citation
Applied Physics Letters
Issue
92
Pub Type
Journals
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Keywords
magnetoresistance, 3d magnetometry, sensor
Citation
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Created April 7, 2008, Updated October 12, 2021