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A z-component magneto-resistive sensor



Fabio C. da Silva, Sean Halloran, Lu Yuan, David P. Pappas


A thin-film sensor is described that measures the component of the magnetic field perpendicular to the plane of the substrate (also called the z-component field.) The sensors are fabricated on anisotropically etched, V-shaped groves on Si(100) substrates. The anisotropic magnetoresistive (AMR) effect was used in order to set the bias parameters for z-component field sensitivity. The final result is a sensor that measures the z-component of the magnetic field with a 40 dB rejection of other comp onents. The devices can be integrated with standard in-plane x- and y-component sensor to form a system with a footprint of less 0.01 mm2 and a noise floor of 20 nT at 1 Hz.
Applied Physics Letters


magnetoresistance, 3d magnetometry, sensor


da Silva, F. , Halloran, S. , Yuan, L. and Pappas, D. (2008), A z-component magneto-resistive sensor, Applied Physics Letters, [online], (Accessed February 27, 2024)
Created April 7, 2008, Updated October 12, 2021