Wavelet Transform Approach to the Analysis of Specular X-Ray Reflectivity Curves
I R. Prudnikov, R J. Matyi, R Deslattes
A method for analyzing X-ray reflectivity curves from multilayered structures with interfacial roughness using a wavelet transform approach has been developed. By using this approach, we have been able (1) to extract the contribution of a particular rough interface to a specular reflectivity curve, and (2) to determine the root-mean-square amplitude of the roughness of a particular interface independently of the other interfaces in the multilayered structure from the specular reflectivity data. Analytical procedures that allow the interpretation of the wavelet coefficients obtained from specular reflectivity curves have been developed. This approach has been successfully applied to experiment reflectivity curves obtained from Cu/Ta, Ta2O5/Ta, and Ta2O5/Ta2 N bilayer structures.