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On-Wafer Measurement of Transmission Lines On Lossy Silicon Substrates



Uwe Arz, Dylan Williams, Hartmut Grabinski


This paper examines broadband measurement techniques for electrical properties of planar transmission lines built on lossy silicon substrates. We start by investigating the performance of a new formulation of the calibration com-parison method which is used to determine the characteristic impedance Zo of single-mode transmission lines. The prop-agation constant is obtained from a multiline Thru-Reflect-Line (TRL) calibration in the transmission lines under test. The measurement results are compared against quasi-analytical calculations of the frequency-dependent transmission line parameters. We apply these measurement methods to deembed the influence of access lines in test structures for asymmetric coupled lines built on highly conductive silicon substrates. The calibrated four-port scattering parameters of the coupled line segments of these test structures are used to determine the conductance and impedance matrices in power-normalized representation with a nonlinear optimization method. We investigate the modal behavior by calculating the cross power shared between the two fundamental modes from measured and predicted line-parameter values.
Proceedings Title
Proc. 2000 URSI Kleinheubacher Tagung Meeting
Conference Dates
September 25-29, 2000
Conference Location
Kleinheubach, 1, GM


coupled transmission line, lossy substrate, microstrip, modal power silicon


Arz, U. , Williams, D. and Grabinski, H. (2000), On-Wafer Measurement of Transmission Lines On Lossy Silicon Substrates, Proc. 2000 URSI Kleinheubacher Tagung Meeting, Kleinheubach, 1, GM (Accessed June 16, 2024)


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Created September 24, 2000, Updated October 12, 2021