NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Vacuum Furnace for Degassing Stainless-Steel Vacuum Components
Published
Author(s)
James A. Fedchak, Julia K. Scherschligt, Daniel S. Barker, Stephen P. Eckel, Alex P. Farrell, Makfir Sefa
Abstract
Ultra-high vacuum systems must often be constructed of materials with ultra-low outgassing rates to achieve pressure of 10-6 Pa and below. In such a case, any component placed into the ultra-high vacuum system must also be constructed of materials with ultra-low outgassing rates. Baking stainless steel vacuum components to a temperature range of 400 450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultra-high vacuum systems. The design, construction, and operation of a vacuum furnace capable of baking vacuum components to a temperature of 450° C while maintaining a vacuum pressure of 10-3 Pa or lower is described. The furnace has been used for extended bakes at 450 °C while maintaining pressures below 10-5 Pa.
Fedchak, J.
, Scherschligt, J.
, Barker, D.
, Eckel, S.
, Farrell, A.
and Sefa, M.
(2018),
Vacuum Furnace for Degassing Stainless-Steel Vacuum Components, Journal of Vacuum Science and Technology A, [online], https://doi.org/10.1116/1.5016181
(Accessed October 9, 2025)