Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Vacuum Furnace for Degassing Stainless-Steel Vacuum Components



James A. Fedchak, Julia K. Scherschligt, Daniel S. Barker, Stephen P. Eckel, Alex P. Farrell, Makfir Sefa


Ultra-high vacuum systems must often be constructed of materials with ultra-low outgassing rates to achieve pressure of 10-6 Pa and below. In such a case, any component placed into the ultra-high vacuum system must also be constructed of materials with ultra-low outgassing rates. Baking stainless steel vacuum components to a temperature range of 400 – 450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultra-high vacuum systems. The design, construction, and operation of a vacuum furnace capable of baking vacuum components to a temperature of 450° C while maintaining a vacuum pressure of 10-3 Pa or lower is described. The furnace has been used for extended bakes at 450 °C while maintaining pressures below 10-5 Pa.
Journal of Vacuum Science and Technology A


Ultra-high vacuum, UHV, extreme-high vacuum, XHV, outgassing
Created March 1, 2018, Updated November 10, 2018