Dragnea, B.
, Preusser, J.
, Schade, W.
, Leone, S.
and Hinsberg, W.
(1999),
Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging, Journal of Applied Physics (Accessed June 13, 2026)
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Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging
Published
Author(s)
B Dragnea, J Preusser, W Schade, , W D. Hinsberg
Abstract
We report transmission infrared near-field scanning microscopy (IR-NSOM) imaging of chemically amplified photoresist polymers patterned by ultraviolet exposure. Chemical specificity was attained using infrared wavelengths tuned to the 3 m OH stretch absorption band of the polymer, a band sensitive to the chemical changes characteristic of the lithographic photochemical process of this material. Contrast mechanisms are discussed togetehr with the IR-NSOM specifics, such as the fabrication of an infrared near-field probe with high throughput, which lead to an attainable resolution of λ/10 and a transmission sensitivity of 1%.Citation
Journal of Applied Physics
Volume
86
Issue
No. 5
Pub Type
Journals
Keywords
infrared, near-field, optical microscopy, photoresist polymers
Citation
Issues
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Created August 31, 1999, Updated October 12, 2021