Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging
B Dragnea, J Preusser, W Schade, S R. Leone, W D. Hinsberg
We report transmission infrared near-field scanning microscopy (IR-NSOM) imaging of chemically amplified photoresist polymers patterned by ultraviolet exposure. Chemical specificity was attained using infrared wavelengths tuned to the 3 m OH stretch absorption band of the polymer, a band sensitive to the chemical changes characteristic of the lithographic photochemical process of this material. Contrast mechanisms are discussed togetehr with the IR-NSOM specifics, such as the fabrication of an infrared near-field probe with high throughput, which lead to an attainable resolution of λ/10 and a transmission sensitivity of 1%.
, Preusser, J.
, Schade, W.
, Leone, S.
and Hinsberg, W.
Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging, Journal of Applied Physics
(Accessed November 30, 2023)