Towards Reproducible Ring Resonator Based Temperature Sensors
Nikolai Klimov, Michaela Berger, Zeeshan Ahmed
In recent years photonic devices have emerged as a powerful tool for developing novel, high-sensitivity sensors. In particular, tremendous progress has been reported in developing photonic temperature sensors using a wide variety of materials including optical fiber and on-chip silicon photonic devices. We recently reported on utlra high sensitivity tempeature sensor based on silicon ring resonator structure that has a noise floor of 80 µK. Here we have systematically examined the impact of structural parameters on the performance of silicon ring resonator photonic themometers. Our results suggest that consistently high performance temperature sensors are obtained from the zone of stability (waveguide width > 600 nm, air gap 130 nm and ring radius > 10 m) such that quality factors are consistent 104 and the temperature sensitivity is in the 70 pm/K to 80 pm/K range. The zone of stability identified in this work is a useful starting point for future testing of inter-changeability wafer-scale produced sensors.
, Berger, M.
and Ahmed, Z.
Towards Reproducible Ring Resonator Based Temperature Sensors, Sensors & Transducers Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919134
(Accessed May 29, 2023)