Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership and increase sensor stability and depolyability has produced considerable interest in developing photonic temperature sensors. Here we demonstrate that silicon photonic crystal cavity-based thermometers can measure temperature with uncertainities of 175 mK (k = 1), where uncertainties are dominated by ageing effects originating from the hysteresis in the device packaging materials. Our results, a ≈ 4-fold improvement over recent devleopments, clearly demonstate the rapid progress of silicon photonic sensors in replacing legacy devices.
Citation: Sensors and Actuators A-Physical
Pub Type: Journals
nanophotonics, thermometry, silicon, ITS90